High electronegativity multi-dipolar electron cyclotron resonance plasma source for etching by negative ions

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Source Development

The ECR ion source (ECRIS) is still an active field of research and development, as demonstrated by the numerous contributions to the ECRIS’12 workshop and ICIS’13 conference. It is impossible to present all the interesting ECR development in this paper. Instead, a selection of ECR development for linear accelerator and synchrotrons are presented along with some original recent ECR contribution...

Electron Cyclotron Resonance Ion Source